CO_2激光-化学腐蚀制作金阵列微电极

电化学（中英文） ›› 2006, Vol. 12 ›› Issue (4): 429-433.

CO_2激光-化学腐蚀制作金阵列微电极

张维;肖江群;周勇亮;

厦门大学化学化工学院化学系化学生物学福建省重点实验室,厦门大学化学化工学院化学系化学生物学福建省重点实验室,厦门大学化学化工学院化学系化学生物学福建省重点实验室福建厦门361005,福建厦门361005,福建厦门361005

收稿日期:2006-11-28 修回日期:2006-11-28 出版日期:2006-11-28 发布日期:2006-11-28

Fabrication of Gold Electrode Array Based on CO_2 Laser Ablation

ZHANG Wei,XIAO Jiang-qun,ZHOU Yong-liang~*

(Department of Chemistry and The Key Laboratory for Chemical Biology of Fujian Province,College of Chemistry and Chemical Engineering,Xiamen University,Xiamen361005,Fujian,China

Received:2006-11-28 Revised:2006-11-28 Published:2006-11-28 Online:2006-11-28

摘要/Abstract

摘要： 微电极的制作是微流控芯片电化学检测的关键技术.本文提出CO2激光烧蚀结合化学腐蚀快速制作微流控芯片阵列微电极的方法.在溅射Au/Cr的玻璃基片上涂敷指甲油作牺牲层,利用CO2激光烧蚀开窗口,经化学腐蚀后获得阵列电极,电极宽度为100μm.考察了激光加工参数及牺牲层对电极加工质量的影响,对由键合包封制作的微流控芯片,循环伏安及流动注射分析测试表明,该电极芯片可用于微流控芯片的安培检测.

关键词: 微流控芯片, 金电极, CO2激光

Abstract: A rapid process is described to produce single or multiple electrodes of any shape based on CO_(2) laser ablation for microfluidic chip.The method is as follow: coating a kind of material as sacrifice layer on a piece of glass with sputtered Cr and Au;designing the needed pattern on a computer;selecting proper parameters and ablating with CO_(2) laser;wiping of Au/Cr and sacrifice layer,and obtain electrodes at last.The microfluidic chip was gotten by reversely bonding with a piece of PDMS,and sealing around with PDMS prepolymer.The mask' effect is the main factor that influencing electrode quality.The width of electrodes could be 100 μm.Demonstrated by voltammetry and flow injection amperometric analysis,the microfluidic chip could be used for amperometric detection.

Key words: Microfluidic chip, Gold electrode, CO_(2) laser

中图分类号:

O657.1

张维;肖江群;周勇亮;. CO_2激光-化学腐蚀制作金阵列微电极[J]. 电化学（中英文）, 2006, 12(4): 429-433.

ZHANG Wei,XIAO Jiang-qun,ZHOU Yong-liang~*. Fabrication of Gold Electrode Array Based on CO_2 Laser Ablation[J]. Journal of Electrochemistry, 2006, 12(4): 429-433.

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链接本文: https://electrochem.xmu.edu.cn/CN/

https://electrochem.xmu.edu.cn/CN/Y2006/V12/I4/429

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