关键词: 多孔硅, 光致发光, 表面形貌

Abstract: Porous silicon structures were formed by a two step technique consisting of electrochemical polarization and chemical oxidation processes in 1∶1 hydrofluoric acid and ethanol solutions. A constant current density of 0.03 A/cm 2 was applied to p type silicon wafers, followed by chemical treatment in 20% nitric acid solutions. These samples were then carefully examined by scanning electron microscope (SEM) and Raman spectrometer to study their surface morphologies and optical properties. After a year storage in a desiccator, the aged porous silicon samples were re examined by SEM and Raman spectrometer before and after treated with styrene and decene(1) organic solvents, respectively. It was found that the Raman intensities of the aged porous silicon samples were significantly enhanced. However, the treatments of the aged porous silicon samples with tow organic solvents did not alter their optical properties.

Key words: Porous silicon, Photoluminescence