关键词: 多孔硅, 光致发光, 预处理

Abstract: In this work, effect of precondition on porous silicon formation was investigated by performing electrochemical polarization measurements. The surface morphologies and optical properties of the samples were also studied by scanning electron microscopy (SEM) and Raman spectrometer. It was demonstrated that precondition enhanced the chemical/electrochemical reactions occurred at Si/solution interface and the growth of porous silicon, which ultimately resulted in a red shift in photoluminescence. However, the thickness of porous silicon decreased with the increase of precondition time. More broad bands were observed with prolonged precondition.