LiBPON薄膜电解质的制备及电化学性能研究

doi:10.61558/2993-074X.1946

电化学（中英文） ›› 2009, Vol. 15 ›› Issue (1): 17-21. doi: 10.61558/2993-074X.1946

LiBPON薄膜电解质的制备及电化学性能研究

吴锋;刘亚栋;陈人杰;陈实;

北京理工大学化工与环境学院国家高技术绿色材料发展中心;

收稿日期:2009-02-28 修回日期:2009-02-28 出版日期:2009-02-28 发布日期:2009-02-28

Preparation and Performance of the Thin-film LiBPON Electrolyte

WU Feng,LIU Ya-dong,CHEN Ren-jie,CHEN Shi

(School of Chemical Engineering and the Environment,National Development Center of Hi-TechGreen Materials,Beijing Institute of Technology,Beijing 100081,China

Received:2009-02-28 Revised:2009-02-28 Published:2009-02-28 Online:2009-02-28

摘要/Abstract

摘要： 应用磁控溅射法在N2气氛中制备LiBPON薄膜电解质,研究薄膜性能与沉积条件的关系,优化其制备条件.扫描电镜图显示其表面平整均匀致密,X射线衍射及交流阻抗测试分别表明该薄膜呈非晶态,室温离子电导率随溅射功率增大而减小,随N2压力增大而增大,最高达3.5×10-6S/cm;薄膜的沉积速率随溅射功率增大而增大,随N2压力增大而减小.N的结合对电解质的电化学性能有明显改善,作为薄膜锂电池电解质有良好的应用前景.

关键词: 薄膜锂电池, LiBPON, 磁控溅射, 薄膜电解质

Abstract: The LiBPON thin-film electrolyte was prepared by magnetron sputtering,and the relationship between the performance and the deposition condition was investigated.As seen in the SEM images,the thin films are dense and uniform without cracks,and according to the XRD patterns they have an amorphous structure.The electrochemical performance of the electrolyte was characterized by electrochemical impedance spectroscopy(EIS).The ionic conductivities of the thin film decreased with the RF power,but increased with the N2 pressure.The an ionic conductivity of 3.5×10-6 S/cm at room temperature was found from the electrochemical measurement.While the deposition rate increased with the RF power,but decreased with the N2 pressure.Nitrogen incorporation can improve the electrochemical performance of the thin film electrolyte,which appears as a promising candidate electrolyte for solid state thin-film lithium batteries.

Key words: Thin film lithium battery, LiBPON, magnetron sputtering, thin film electrolyte

中图分类号:

TM912.9

吴锋, 刘亚栋, 陈人杰, 陈实, . LiBPON薄膜电解质的制备及电化学性能研究[J]. 电化学（中英文）, 2009, 15(1): 17-21.

WU Feng, LIU Ya-dong, CHEN Ren-jie, CHEN Shi. Preparation and Performance of the Thin-film LiBPON Electrolyte[J]. Journal of Electrochemistry, 2009, 15(1): 17-21.

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https://electrochem.xmu.edu.cn/CN/Y2009/V15/I1/17

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LiBPON薄膜电解质的制备及电化学性能研究

Preparation and Performance of the Thin-film LiBPON Electrolyte

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