关键词: ICP刻蚀, 硅模板, PDMS, 超疏水

Abstract: A series of different dimensions regularly micropillar array hydrophobic Poly(dimethylsiloxane)(PDMS) surfaces were obtained by peeling off PDMS which was poured onto the silicon models.The silicon models were prepared by ICP etching technology.The results indicate that the water contact angle(WCA) was increased with the size and the height of the mocropillar,decreased with increasing the distance of the mocropillar when the height of the micropillar was relative small;if the height of the micropillar was relative big,WCA was decreased with increasing the size of micropillar,meanwhile,the distance of the micropillar was a complex factor to WCA,and the height of the micropillar have little influence.The biggest of WCA on this micopillar array PDMS surface can reach to about 151° when the size,distance,height of the micropillar were 14μm,6μm,14μm respectively.

Key words: ICP etching, silicon model, PDMS, superhydrophobic