钴互连化学机械抛光浆料中的界面腐蚀行为研究
秦凯旋, 常鹏飞, 黄钰林, 李明, 杭弢
An Investigation on the Interface Corrosion Behaviors of Cobalt Interconnects in Chemical Mechanical Polishing Slurry
Kai-Xuan Qin, Peng-Fei Chang, Yu-Lin Huang, Ming Li, Tao Hang
电化学（中英文）
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2022, (6): 2104471
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DOI: 10.13208/j.electrochem.210447
