特殊整平剂甲基橙在通孔电镀铜的应用
收稿日期: 2022-03-04
修回日期: 2022-04-10
网络出版日期: 2022-05-24
Investigation of Through-Hole Copper Electroplating with Methyl Orange as A Special Leveler
Received date: 2022-03-04
Revised date: 2022-04-10
Online published: 2022-05-24
徐佳莹 , 王守绪 , 苏元章 , 杜永杰 , 齐国栋 , 何为 , 周国云 , 张伟华 , 唐耀 , 罗毓瑶 , 陈苑明 . 特殊整平剂甲基橙在通孔电镀铜的应用[J]. 电化学, 2022 , 28(7) : 2213003 . DOI: 10.13208/j.electrochem.2213003
Methyl Orange (MO) with two kinds of functional groups can act as both an accelerator and an inhibitor, which has been used as a special leveler to simplify the electroplating additive system in the through-hole (TH) copper electroplating experiments. In this work, the role of MO in TH electroplating is characterized by molecular dynamics simulations and quantum chemical calculations. It is suggested that MO can spontaneously flatten the copper surface and be well adsorbed on the cathode surface, which inhibit the copper electrodeposition on the cathode. Electrochemical behavior of MO was evaluated by galvanostatic measurements (GM) and cyclic voltammetry (CV) to confirm that MO hardly affects the potential due to its duel functions of depolarizing and polarizing effects from the molecular structure of sulfonic acid group and other groups to achieve the internal Cu2+ reduction acceleration and mass transfer inhibition. Throw power value of TH with the aspect ratio of 10:1 could reach 92.34% from the base plating solution bath with the additions of only EO/PO and MO. The study of MO could provide new ideas for the development of electroplating additive system.
Key words: copper electroplating; through-hole; additive; methyl orange
[1] | Wang C, Zhang J Q, Yang P X, Zhang B Q, An M Z. Through-hole copper electroplating using nitrotetrazolium blue chloride as a leveler[J]. J. Electrochem. Soc., 2013, 160(3): D85-D88. |
[2] | Wang C, Zhang J Q, Yang P X, An M Z. Electrochemical behaviors of Janus Green B in through-hole copper electroplating: An insight by experiment and density functional theory calculation using Safranine T as a comparison[J]. Electrochim. Acta, 2013, 92: 356-364. |
[3] | Ding X C, Peng D M, Chen Z X, Cheng J. Effect of novel leveling agent TS-L on electrodeposition of copper[J]. Ele-ctroplating&Finishing, 2016, 35(11): 556-559. |
[4] | Zheng L. Investigation on electrochemical performance and tuning property of the organic-additive-system for copper electrodeposition[D]. Chengdu: University of Electronic Science and Technology of China, 2020. |
[5] | Zhang Y H, An M Z, Yang P X, Zhang J Q. Recent advances in electroplating of though-hole copper interconnection[J]. Electrocatalysis, 2021, 12(6): 619-627. |
[6] | Li Y B, Wang W, Li Y L. Adsorption behavior and related mechanism of Janus Green B during copper via-filling process[J]. J. Electrochem. Soc., 2009, 156(4): D119-D124. |
[7] | Tao Z H, Liu G T, Li Y X, Su H. Electrochemical and analytical study of electroplating additive in copper plating solution for microvia filling[J]. Circuit World, 2019, 45(3): 124-131. |
[8] | Zheng L, He W, Zhu K, Wang C, Wang S X, Hong Y, Chen Y M, Zhou G Y, Miao H, Zhou J Q. Investigation of poly (1-vinyl imidazole co 1, 4-butanediol diglycidyl ether) as a leveler for copper electroplating of through-hole[J]. Electrochim. Acta, 2018, 283: 560-567. |
[9] | Xiang J. Mechanism and application of copper eletrodeposition for the interconnection structures in package substrate[D]. Chengdu: University of Electronic Science and Technology of China, 2018. |
[10] | Chen B A, Wang A Y, Wu S Y, Wang L M. Polyquaternium-2: A New levelling agent for copper electroplating from acidic sulphate bath[J]. Electrochemistry, 2016, 84(6): 414-419. |
[11] | Wang C, Peng C, Xiang J, Chen Y M, He W, Su X H, Luo Y Y. Research and application of copper electroplating in interconnection of printed circuit board[J]. J. Electrochem., 2021, 27(3): 257-268. |
[12] | Lai Z Q. Research and application of high speed copper electroplating for the interconnection micro-holes of pri-nted circuit board[D]. Chengdu: University of Electronic Science and Technology of China, 2020. |
[13] | Liu C W, Tsao J C, Tsai M S, Wang Y L. Effects of wetting ability of plating electrolyte on Cu seed layer for electroplated copper film[J]. J. Vac. Sci. Technol. A, 2004, 22(6): 2315-2320. |
[14] | Wang C. Study on molecular simulation and mechanism of the additives used for through-hole copper electroplating on PCB[D]. Harbin: Harbin Institute of Technology, 2013. |
[15] | Wang Y F, Hong Y, Zhou G Y, Wang X H, Song J H, He W, Gao Z P, Zhang W H, Sun R, Sun Y K, Ai K H, Li Q H. Mechanism of a catalytic silver(I)-complex: assisted electroless deposition of inductance coil on poly(ethylene terephthalate) film[J]. J. Mater. Sci.-Mater. Electron., 2020, 31(11): 8165-8173. |
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