用规整膜板对砷化镓的三维微结构图形加工刻蚀
黄海苟,孙建军,叶雄英,蒋利民,罗瑾,卢泽生,董申,田中群,周兆英,田昭武
Three-dimensional Microfabrication on GaAs Using a Regular Patterns Mold
HUANG Hai_gou 1, SUN Jian_jun 1, YE Xiong_ying 2, JIANG Li_min 1, LUO Jin 1, LU Ze_sheng 3,DONG Shen 3,TIAN Zhong_qun 1,ZHOU Zhao_ying 2* ,TIAN Zhao_wu 1*
电化学（中英文）
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2000, (3): 253
-257
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