移动阴极式掩膜电解加工微沟槽阵列均匀性研究
杜立群, 温义奎, 关发龙, 翟科, 叶作彦, 王超
Study on the Uniformity of Microgrooves in Through-Mask Electrochemical Micromachining with Moving Cathode
Li-Qun Du, Yi-Kui Wen, Fa-Long Guan, Ke Zhai, Zuo-Yan Ye, Chao Wang
电化学（中英文）
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2021, (6): 658
-670
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DOI: 10.13208/j.electrochem.201224
