本文根据田昭武在中国化学会第一届全国纳米技术与应用会议 (2 0 0 0 .11.2 8,厦门 )特邀大会报告内容整理而成 :1 微系统技术概述 (技术的必要性和前景 )2 发展微系统技术的特殊困难3 电化学在微系统技术中的应用 3.1 用于复杂 3D 图形微加工的约束刻蚀剂层技术 (CELT) 3.2 聚焦电泳和微系统在 (生物 )化学中的应用 (μ TAS或芯片上实验室 ) 3.3 芯片实验室中微流体输运网络的合理选择之一 -灵巧 (Smart)电渗泵4 结论
Brief introduction to microsystems 2 Discussions on the developments of microsystem technologies 3 Applications of electrochemistry in microsystem 3.1 Confined Etchant Layer Technique (CELT) for the complex 3D-pattern micromachining 3.2 Focusing Electrophoresis and the application of microsystem in (bio) chemistry (μTAS or Lab on A Chip) 3.3 Smart Electro-Osmosis pump——a reasonable choosing for microfluidic network 4 Concluding remark
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