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研究论文

镍表面三维微图形的复制加工

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收稿日期: 2004-08-28

  修回日期: 2004-08-28

  网络出版日期: 2004-08-28

Chemical Microetching of Three-dimensional Gear-like Pattern on Nickel Surface

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  • (1), JIANG Li-ming~(1), TANG Jing~(1), ZHANG Li~(1), TIAN Zhong-qun~(*1), TIAN Zhao-wu~(1), LIU Pin-kuan~(2),SUN Li-ning~(2) (1.State Key Lab.for Phys.Chem.of Solid Surf.,Depart. of Chem., Xiamen Univ.,Xiamen 361005,China, 2.The Institute of Robots, Harbin Institute of Technology, Harbin 150001, China

Received date: 2004-08-28

  Revised date: 2004-08-28

  Online published: 2004-08-28

摘要

运用约束刻蚀剂层技术(CELT)在金属镍(Ni)表面实现三维微图形加工,以规整的三维齿状微结构作模板,获得可有效CELT加工的化学刻蚀和捕捉体系,在Ni表面得到了与齿状结构互补的三维微结构并应用扫描电子显微镜(SEM)和原子力显微镜(AFM)表征刻蚀图案,证实CELT可用于金属表面Ni的三维微图形刻蚀加工.

本文引用格式

刘柱方 . 镍表面三维微图形的复制加工[J]. 电化学, 2004 , 10(3) : 249 -253 . DOI: 10.61558/2993-074X.1571

Abstract

The chemical micromachining on nickel surface with three-dimensional (3D) gear-like mold was realized by confined etchant layer technique (CELT). By using effective chemical etching and scavenging system (HNO_(3) + NaOH) and optimizing experimental parameters, such as the etching time, etching current density, concentration of the etchant or and scavenger, we obtained the etched pattern, which is close to negative copy of the mold. The etched micro-pattern characterized by SEM and AFM, demonstrates that CELT can be applied to the 3-D microstructure replication on nickel surface .

参考文献

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