运用约束刻蚀剂层技术(CELT)在金属镍(Ni)表面实现三维微图形加工,以规整的三维齿状微结构作模板,获得可有效CELT加工的化学刻蚀和捕捉体系,在Ni表面得到了与齿状结构互补的三维微结构并应用扫描电子显微镜(SEM)和原子力显微镜(AFM)表征刻蚀图案,证实CELT可用于金属表面Ni的三维微图形刻蚀加工.
The chemical micromachining on nickel surface with three-dimensional (3D) gear-like mold was realized by confined etchant layer technique (CELT). By using effective chemical etching and scavenging system (HNO_(3) + NaOH) and optimizing experimental parameters, such as the etching time, etching current density, concentration of the etchant or and scavenger, we obtained the etched pattern, which is close to negative copy of the mold. The etched micro-pattern characterized by SEM and AFM, demonstrates that CELT can be applied to the 3-D microstructure replication on nickel surface .
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