应用磁控溅射法在N2气氛中制备LiBPON薄膜电解质,研究薄膜性能与沉积条件的关系,优化其制备条件.扫描电镜图显示其表面平整均匀致密,X射线衍射及交流阻抗测试分别表明该薄膜呈非晶态,室温离子电导率随溅射功率增大而减小,随N2压力增大而增大,最高达3.5×10-6S/cm;薄膜的沉积速率随溅射功率增大而增大,随N2压力增大而减小.N的结合对电解质的电化学性能有明显改善,作为薄膜锂电池电解质有良好的应用前景.

The LiBPON thin-film electrolyte was prepared by magnetron sputtering,and the relationship between the performance and the deposition condition was investigated.As seen in the SEM images,the thin films are dense and uniform without cracks,and according to the XRD patterns they have an amorphous structure.The electrochemical performance of the electrolyte was characterized by electrochemical impedance spectroscopy(EIS).The ionic conductivities of the thin film decreased with the RF power,but increased with the N2 pressure.The an ionic conductivity of 3.5×10-6 S/cm at room temperature was found from the electrochemical measurement.While the deposition rate increased with the RF power,but decreased with the N2 pressure.Nitrogen incorporation can improve the electrochemical performance of the thin film electrolyte,which appears as a promising candidate electrolyte for solid state thin-film lithium batteries.